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0 reviewsFlexible implantable electrodes provide unprecedented opportunities for gentle mechanicalinteraction with soft neural tissues to acquire stable electrophysiological signals and reduce risk of1234567890():,;1234567890():,;tissue inflammatory response. Most electrocorticography (ECoG) electrodes adopt polymer film orsilicone as substrate, with thickness sacrifice or poor micromachining precision, respectively.Besides, the distance of recessed electrode site to cortical surface leads to signal degradation. Here,we report a 3D polyimide-based electrode array on soft microbumps (height, 327 µm), with bufferingcontact capability and reliable mechanical strength that alleviates the mismatch from dental cement orcranial window. We demonstrate the reshaping processes of conventional 2D sites (diameter, 200 µm)into 3D protruding structure by stress-free preforming and silicone casting. The 3D soft microbumpelectrodes (SMBE) remain well undergoing whether cyclic voltammetry scanning or cycliccompression. The acute implanted SMBE array has shown sensitive response to whisker pulling andinsusceptible stability by external force of anesthetic rats.
