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Advanced Memsnems Fabrication And Sensors Zhuoqing Yang

  • SKU: BELL-38185398
Advanced Memsnems Fabrication And Sensors Zhuoqing Yang
$ 31.00 $ 45.00 (-31%)

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Advanced Memsnems Fabrication And Sensors Zhuoqing Yang instant download after payment.

Publisher: Springer
File Extension: PDF
File size: 16.48 MB
Pages: 318
Author: Zhuoqing Yang
ISBN: 9783030797485, 3030797481
Language: English
Year: 2021

Product desciption

Advanced Memsnems Fabrication And Sensors Zhuoqing Yang by Zhuoqing Yang 9783030797485, 3030797481 instant download after payment.

This book begins by introducing new and unique fabrication, micromachining, and integration manufacturing methods for MEMS (Micro-Electro-Mechanical Systems) and NEMS (Nano-Electro-Mechanical Systems) devices, as well as novel nanomaterials for sensor fabrications. The second section focuses on novel sensors based on these emerging MEMS/NEMS fabrication methods, and their related applications in industrial, biomedical, and environmental monitoring fields, which makes up the sensing layer (or perception layer) in IoT architecture. This authoritative guide offers graduate students, postgraduates, researchers, and practicing engineers with state-of-the-art processes and cutting-edge technologies on MEMS /NEMS, micro- and nanomachining, and microsensors, addressing progress in the field and prospects for future development.
  • Presents latest international research on MEMS/NEMS fabrication technologies and novel micro/nano sensors;
  • Covers a broad spectrum of sensor applications;
  • Written by leading experts in the field.

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