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Dualmass Linear Vibration Siliconbased Mems Gyroscope Huiliang Cao

  • SKU: BELL-49268808
Dualmass Linear Vibration Siliconbased Mems Gyroscope Huiliang Cao
$ 31.00 $ 45.00 (-31%)

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Dualmass Linear Vibration Siliconbased Mems Gyroscope Huiliang Cao instant download after payment.

Publisher: Springer
File Extension: PDF
File size: 10.7 MB
Pages: 222
Author: Huiliang Cao
ISBN: 9789811992469, 9811992460
Language: English
Year: 2023

Product desciption

Dualmass Linear Vibration Siliconbased Mems Gyroscope Huiliang Cao by Huiliang Cao 9789811992469, 9811992460 instant download after payment.

This book introduces the key technologies in the manufacture of double-mass line vibrating silicon micromechanical gyroscope, respectively. The design of gyrostructure, detection technology, orthogonal correction technology, the influence of temperature and the design of measurement and control system framework are introduced in detail, with illustrations for easy understanding. It presents the principle, structure and related technology of silicon-based MEMS gyroscope. The content enlightens the researchers of silicon-based MEMS gyroscopes and gives readers a new understanding of the structural design of silicon-based gyroscopes and the design of dual-mass gyroscopes.

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