Enabling Technology For Mems And Nanodevices Henry Baltes Oliver Brand by Henry Baltes, Oliver Brand, Gary K. Fedder, Christofer Hierold, Jan G. Korvink, Osamu Tabata 9783527307463, 9783527616701, 352730746X, 3527616705 instant download after payment.

Microstructures, electronics, nanotechnology - these vast fields of research are growing together as the size gap narrows and many different materials are combined. Current research, engineering sucesses and newly commercialized products hint at the immense innovative potentials and future applications that open up once mankind controls shape and function from the atomic level right up to the visible world without any gaps.
Sensor systems, microreactors, nanostructures, nanomachines, functional surfaces, integrated optics, displays, communications technology, biochips, human/machine interfaces, prosthetics, miniaturized medical and surgery equipment and many more opportunities are being explored.
This new series, Advanced Micro & Nanosystems, provides cutting-edge reviews from top authors on technologies, devices and advanced systems from the micro and nano worlds.Content:
Chapter 1 M3: the Third Dimension of Silicon (pages 1–19): P. M. Sarro
Chapter 2 Trends in MEMS Commercialization (pages 21–47): J. W. Knutti and H. V. Allen
Chapter 3 Capacitive Interfaces for MEMS (pages 49–92): V. P. Petkov and B. E. Boser
Chapter 4 Packaging of Advanced Micro? and Nanosystems (pages 93–164): V. M. Bright, C. R. Stoldt, D. J. Monk, M. Chapman and A. Salian
Chapter 5 High?frequency Integrated Microelectromechanical Resonators and Filters (pages 165–192): F. Ayazi
Chapter 6 MEMS in Mass Storage Systems (pages 193–236): T. R. Albrecht, M. Despont, E. Eleftheriou, J. U. Bu and T. Hirano
Chapter 7 Scanning Micro? and Nanoprobes for Electrochemical Imaging (pages 237–287): C. Kranz, A. Kueng and B. Mizaikoff
Chapter 8 Nanofluidic Modeling and Simulation (pages 289–317): M. Geier, A. Greiner, D. Kauzlaric and J. G. Korvink
Chapter 9 Nanofluidics – Structures and Devices (pages 319–355): J. Lichtenberg and H. Baltes
Chapter 10 Carbon Nanotubes and Sensors: a Review (pages 357–382): J. R. Stetter and G. J. Maclay
Chapter 11 CMOS?based DNA Sensor Arrays (pages 383–414): R. Thewes, F. Hofmann, A. Frey, M. Schienle, C. Paulus, P. Schindler?Bauer, B. Holzapfl and R. Brederlow