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Field Guide To Optical Lithography Spi Chris A Mack

  • SKU: BELL-4770136
Field Guide To Optical Lithography Spi Chris A Mack
$ 31.00 $ 45.00 (-31%)

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Field Guide To Optical Lithography Spi Chris A Mack instant download after payment.

Publisher: SPIE Publications
File Extension: PDF
File size: 3.3 MB
Pages: 136
Author: Chris A. Mack
ISBN: 9780819462077, 0819462071
Language: English
Year: 2006
Edition: Spi

Product desciption

Field Guide To Optical Lithography Spi Chris A Mack by Chris A. Mack 9780819462077, 0819462071 instant download after payment.

The material in this Field Guide is a distillation of material put together by Chris Mack over the past 20 years, including notes from his graduate-level lithography course at the University of Texas at Austin. This Field Guide details the lithography process, image formation, imaging onto a photoresist, photoresist chemistry, and lithography control and optimization. An introduction to next-generation lithographic technologies is also included, as well as an extensive lithography glossary and a summation of salient equations critical to anyone involved in the lithography industry.

Contents

- Symbol Glossary
- The Lithgraphy Process
- Image Formation
- Imaging into a Photoresist
- Photoresist Chemistry
- Lithography Control and Optimization
- Equation Summary
- Glossary
- Index

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