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Handbook Of 3d Integration Volume 3 3d Process Technology 3rd Edition Philip Garrou Mitsumasa Koyanagi Peter Ramm

Name: Handbook Of 3d Integration Volume 3 3d Process Technology 3rd Edition Philip Garrou Mitsumasa Koyanagi Peter Ramm
SKU: BELL-5301796
Price: 31.00 USD
Availability: InStock
Rating: 5 (108 reviews)

SKU: BELL-5301796

$ 31.00 ~~$ 45.00~~ (-31%)

5.0

108 reviews

Handbook Of 3d Integration Volume 3 3d Process Technology 3rd Edition Philip Garrou Mitsumasa Koyanagi Peter Ramm instant download after payment.

Publisher: Wiley-VCH Verlag GmbH

File Extension: PDF

File size: 33.04 MB

Pages: 474

Author: Philip Garrou; Mitsumasa Koyanagi; Peter Ramm

ISBN: 9783527334667, 3527334661

Language: English

Year: 2014

Edition: 3

Product desciption

Handbook Of 3d Integration Volume 3 3d Process Technology 3rd Edition Philip Garrou Mitsumasa Koyanagi Peter Ramm by Philip Garrou; Mitsumasa Koyanagi; Peter Ramm 9783527334667, 3527334661 instant download after payment.

Edited by key figures in 3D integration and written by top authors from high-tech companies and renowned research institutions, this book covers the intricate details of 3D process technology. As such, the main focus is on silicon via formation, bonding and debonding, thinning, via reveal and backside processing, both from a technological and a materials science perspective. The last part of the book is concerned with assessing and enhancing the reliability of the 3D integrated devices, which is a prerequisite for the large-scale implementation of this emerging technology.
Invaluable reading for materials scientists, semiconductor physicists, and those working in the semiconductor industry, as well as IT and electrical engineers.