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Handbook Of Silicon Semiconductor Metrology A C Diebold

Name: Handbook Of Silicon Semiconductor Metrology A C Diebold
SKU: BELL-4102326
Price: 31.00 USD
Availability: InStock
Rating: 4.25 (68 reviews)

SKU: BELL-4102326

$ 31.00 ~~$ 45.00~~ (-31%)

4.3

68 reviews

Handbook Of Silicon Semiconductor Metrology A C Diebold instant download after payment.

Publisher: Marcel Dekker

File Extension: PDF

File size: 12.94 MB

Pages: 866

Author: A C Diebold

ISBN: 9780203904541, 9780824705060, 0203904540, 0824705068

Language: English

Year: 2001

Product desciption

Handbook Of Silicon Semiconductor Metrology A C Diebold by A C Diebold 9780203904541, 9780824705060, 0203904540, 0824705068 instant download after payment.

Containing more than 300 equations and nearly 500 drawings, photographs, and micrographs,this reference surveys key areas such as optical measurements and in-line calibration methods. It describes cleanroom-based measurement technology used during the manufacture of silicon integrated circuits and covers model-based, critical dimension, overlay, acoustic film thickness, dopant dose, junction depth, and electrical measurements; particle and defect detection; and flatness following chemical mechanical polishing. Providing examples of well-developed metrology capability, the book focuses on metrology for lithography, transistor, capacitor, and on-chip interconnect process technologies.