Integration Of Ferroelectric And Piezoelectric Thin Films Concepts And Applications For Microsystems Emmanuel Defayauth by Emmanuel Defay(auth.) 9781118616635, 9781848212398, 1118616634, 1848212399 instant download after payment.

This book contains four parts. The first one is dedicated to concepts. It starts with the definitions and examples of what is piezo-pyro and ferroelectricity by considering the symmetry of the material. Thereafter, these properties are described within the framework of Thermodynamics. The second part described the way to integrate these materials in Microsystems. The third part is dedicated to characterization: composition, structure and a special focused on electrical behaviors. The last part gives a survey of state of the art applications using integrated piezo or/and ferroelectric films.Content:
Chapter 1 Dielectricity, Piezoelectricity, Pyroelectricity and Ferroelectricity (pages 1–24):
Chapter 2 Thermodynamic Study (pages 25–48):
Chapter 3 Ferroelectric?paraelectric Phase Transition Thermodynamic Modeling (pages 49–65):
Chapter 4 Mechanical Formalism (pages 67–93):
Chapter 5 Dielectric Formalism (pages 95–117):
Chapter 6 Piezoelectric Formalism (pages 119–142):
Chapter 7 Acoustic Formalism (pages 143–190):
Chapter 8 Electrostrictive Formalism (pages 191–206):
Chapter 9 Electric Characterization (pages 207–247):
Chapter 10 Piezoelectric Resonators and Filters (pages 249–295):
Chapter 11 High Overtone Bulk Acoustic Resonator (HBAR) (pages 297–313):
Chapter 12 Electrostrictive Resonators (pages 315–356):
Chapter 13 Thin Film Piezoelectric Transducers (pages 357–396):