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ISBN 10: 3642268528
ISBN 13: 978-3642268526
Author: Werner Karl Schomburg
The book describes the design of micro systems systematically as well as the equations needed for an estimation of the basic elements. It can be used without knowing fabrication processes of micro systems and provides the basic equations needed to calculate the effects and forces which are important in micro systems. For quick reference equations are presented in tables which are found in an index at the end of this book.
Chapter 1: Introduction
Chapter 2: Scaling Laws
Chapter 3: Elastic Deformations
Chapter 4: Thin Films
Chapter 5: Conductor Paths
Chapter 6: Electrical Measurements
Chapter 7: Membranes
Chapter 8: Strain Gauges on Membranes
Chapter 9: Beams
Chapter 10: Vibrations
Chapter 11: Capillaries
Chapter 12: Capacitive Forces
Chapter 13: Piezoelectric Effect
Chapter 14: Thermal Actuators
Chapter 15: Micro Optics
Chapter 16: Diffusion
Chapter 17: Micro Valves
Chapter 18: Micro Pumps
Chapter 19: Micro Dosing
Chapter 20: Analogies of Physical Domains
Chapter 21: Mechanical Devices for Electronics
Chapter 22: Pressure Sensors
Chapter 23: Flow Sensors
Chapter 24: Inertial Sensors
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Tags: Werner Karl Schomburg, Introduction, Microsystem, Design
