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ISBN 10: 0735403651
ISBN 13: 978-0735403659
Author: Karen J. Kirkby, Russell Gwilliam, Andy Smith, David Chivers
This is the premier world conference for the presentation of the latest advances in ion implantation, from the fundamentals of ion-solid interactions to manufacturing implant equipment. All papers were peer-reviewed. Ion implantation is used to manufacture semiconductor devices. Materials properties are changed by bombarding wafers with atoms, which are accelerated in an ion implanter.
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Tags: Karen J Kirkby, Russell Gwilliam, Andy Smith, David Chivers, Ion, Implantation, Technology, 16th, International, Conference, IIT, 2006
