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Lecture Notes On Principles Of Plasma Processing 1st Edition Francis F Chen

SKU: BELL-904220

$ 31.00 ~~$ 45.00~~ (-31%)

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Lecture Notes On Principles Of Plasma Processing 1st Edition Francis F Chen instant download after payment.

Publisher: Springer

File Extension: PDF

File size: 14.27 MB

Pages: 249

Author: Francis F. Chen, Jane P. Chang

ISBN: 9780306474972, 0306474972

Language: English

Year: 2003

Edition: 1

Product desciption

Lecture Notes On Principles Of Plasma Processing 1st Edition Francis F Chen by Francis F. Chen, Jane P. Chang 9780306474972, 0306474972 instant download after payment.

Отличные лекции по физике плазмы с хорошими иллюстрациями. Один из авторов Ф.Ф. Чен хорошо известен среди специалистов по физ. плазмы. Некотрые книги были переведены на русский язык. Данные лекции написаны простым языком, студенты более-менее знающие англ. язык смогут читать без проблем. ------------------------------------------------------------- Why study plasma processing? Because we can't get along without computer chips and mobile phones these days. About half the steps in making a semicon- ductor circuit require a plasma, and plasma machines ac- count for most of the equipment cost in a "fab ". Design- ers, engineers, and technicians need to know how a plasma behaves.