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Lowk Nanoporous Interdielectrics Materials Thin Film Fabrications Structures And Properties Materials Thin Film Fabrications Structures And Properties 1st Edition Moonhor Ree Jinhwan Yoo Kyuyoung Heo

  • SKU: BELL-51360748
Lowk Nanoporous Interdielectrics Materials Thin Film Fabrications Structures And Properties Materials Thin Film Fabrications Structures And Properties 1st Edition Moonhor Ree Jinhwan Yoo Kyuyoung Heo
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Lowk Nanoporous Interdielectrics Materials Thin Film Fabrications Structures And Properties Materials Thin Film Fabrications Structures And Properties 1st Edition Moonhor Ree Jinhwan Yoo Kyuyoung Heo instant download after payment.

Publisher: Nova Science Publishers, Incorporated
File Extension: PDF
File size: 2.1 MB
Pages: 77
Author: Moonhor Ree; Jinhwan Yoo; Kyuyoung Heo
ISBN: 9781617283185, 1617283185
Language: English
Year: 2010
Edition: 1

Product desciption

Lowk Nanoporous Interdielectrics Materials Thin Film Fabrications Structures And Properties Materials Thin Film Fabrications Structures And Properties 1st Edition Moonhor Ree Jinhwan Yoo Kyuyoung Heo by Moonhor Ree; Jinhwan Yoo; Kyuyoung Heo 9781617283185, 1617283185 instant download after payment.

The use of low dielectric constant (low-k) interdielectrics in multilevel structure integrated circuits (ICs) can lower line-to-line noise in interconnects and alleviate power dissipation issues by reducing the capacitance between the interconnect conductor lines. Because of these merits, low-k interdielectric materials are currently in high demand in the development of advanced ICs. One important approach to obtaining low-k values is the incorporation of nanopores into dielectrics. This book provides an overview of the methodologies and characterization techniques used for investigating low-k nanoporous interdielectrics.

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