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Mems Mechanical Sensors Illustrated Edition Stephen Beeby

  • SKU: BELL-34616982
Mems Mechanical Sensors Illustrated Edition Stephen Beeby
$ 31.00 $ 45.00 (-31%)

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Mems Mechanical Sensors Illustrated Edition Stephen Beeby instant download after payment.

Publisher: Artech House
File Extension: PDF
File size: 4.06 MB
Pages: 269
Author: Stephen Beeby
ISBN: 9781580535366, 1580535364
Language: English
Year: 2004
Edition: illustrated edition

Product desciption

Mems Mechanical Sensors Illustrated Edition Stephen Beeby by Stephen Beeby 9781580535366, 1580535364 instant download after payment.

Here's the book to keep handy when you have to overcome obstacles in design, simulation, fabrication and application of MEMS sensors. This practical guide to design tools and packaging helps you create the sensors you need for the full range of mechanical microsensor applications. Critical physical sensing techniques covered include piezoresistive, piezoelectric, capacative, optical, resonant, actuation, thermal, and magnetic, as well as smart sensing.

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