Metrology And Diagnostic Techniques For Nanoelectronics Ma Zhiyong Seiler by Ma, Zhiyong; Seiler, David G 9781351733953, 1351733958 instant download after payment.

This book covers up-to-date advances in research and industry practices in nanometrology, critical for continuing technology scaling and product innovation. It holistically approaches the subject matter and addresses emerging and important topics in semiconductor R&D and manufacturing. It is a complete guide for metrology and diagnostic techniques essential for process technology, electronics packaging, and product development and debugging. - Provided by the publisher.
Abstract: This book covers up-to-date advances in research and industry practices in nanometrology, critical for continuing technology scaling and product innovation. It holistically approaches the subject matter and addresses emerging and important topics in semiconductor R&D and manufacturing. It is a complete guide for metrology and diagnostic techniques essential for process technology, electronics packaging, and product development and debugging. - Provided by the publisher