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ISBN 10: 3527296344
ISBN 13: 978-3527296347
Author: Wolfgang Menz, Jürgen Mohr, Oliver Paul
This completely revised edition of a bestselling concise introduction to microsystems technology includes the latest trends in this emerging scientific discipline. The chapters on silicium and LIGA technology are greatly expanded, whilst new topics include application aspects in medicine and health technology, lithography and electroplating.
Frontmatter
Summary
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CHAPTER 1 General Introduction to Microstructure Technology
CHAPTER 2 The Parallels to Microelectronics
CHAPTER 3 The Physical and Chemical Basics in Microtechnology
CHAPTER 4 Basic Technologies in MEMS
CHAPTER 5 Lithography
CHAPTER 6 Silicon Microsystem Technology
CHAPTER 7 The LIGA Process
CHAPTER 8 Alternative Processes of Microstructuring
CHAPTER 9 Packaging and Interconnecting Techniques (PIT)
CHAPTER 10 System Technology
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Index
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Liteature
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Tags: Wolfgang Menz, Jurgen Mohr, Oliver Paul, Microsystem, Technology
