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Multilayer Integrated Film Bulk Acoustic Resonators 1st Edition Yafei Zhang

  • SKU: BELL-4231010
Multilayer Integrated Film Bulk Acoustic Resonators 1st Edition Yafei Zhang
$ 31.00 $ 45.00 (-31%)

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Multilayer Integrated Film Bulk Acoustic Resonators 1st Edition Yafei Zhang instant download after payment.

Publisher: Springer-Verlag Berlin Heidelberg
File Extension: PDF
File size: 3.75 MB
Pages: 154
Author: Yafei Zhang, Da Chen (auth.)
ISBN: 9783642317750, 9783642317767, 3642317758, 3642317766
Language: English
Year: 2013
Edition: 1

Product desciption

Multilayer Integrated Film Bulk Acoustic Resonators 1st Edition Yafei Zhang by Yafei Zhang, Da Chen (auth.) 9783642317750, 9783642317767, 3642317758, 3642317766 instant download after payment.

Mulilayer Integrated Film Bulk Acoustic Resonators mainly introduces the theory, design, fabrication technology and application of a recently developed new type of device, multilayer integrated film bulk acoustic resonators, at the micro and nano scale involving microelectronic devices, integrated circuits, optical devices, sensors and actuators, acoustic resonators, micro-nano manufacturing, multilayer integration, device theory and design principles, etc. These devices can work at very high frequencies by using the newly developed theory, design, and fabrication technology of nano and micro devices.

Readers in fields of IC, electronic devices, sensors, materials, and films etc. will benefit from this book by learning the detailed fundamentals and potential applications of these advanced devices.

Prof. Yafei Zhang is the director of the Ministry of Education’s Key Laboratory for Thin Films and Microfabrication Technology, PRC; Dr. Da Chen was a PhD student in Prof. Yafei Zhang’s research group.

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