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Nanolithography The Art Of Fabricating Nanoelectronic And Nanophotonic Devices And Systems Woodhead Publishing Series In Electronic And Optical Materials M Feldman Editor

SKU: BELL-50334660

Nanolithography The Art Of Fabricating Nanoelectronic And Nanophotonic Devices And Systems Woodhead Publishing Series In Electronic And Optical Materials M Feldman Editor

$ 31.00 ~~$ 45.00~~ (-31%)

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Nanolithography The Art Of Fabricating Nanoelectronic And Nanophotonic Devices And Systems Woodhead Publishing Series In Electronic And Optical Materials M Feldman Editor instant download after payment.

Publisher: Woodhead Publishing

File Extension: PDF

File size: 37.08 MB

Pages: 592

Author: M Feldman (editor)

ISBN: 9780857095008, 0857095005

Language: English

Year: 2014

Volume: 42

Product desciption

Nanolithography The Art Of Fabricating Nanoelectronic And Nanophotonic Devices And Systems Woodhead Publishing Series In Electronic And Optical Materials M Feldman Editor by M Feldman (editor) 9780857095008, 0857095005 instant download after payment.

Integrated circuits, and devices fabricated using the techniques developed for integrated circuits, have steadily gotten smaller, more complex, and more powerful. The rate of shrinking is astonishing – some components are now just a few dozen atoms wide. This book attempts to answer the questions, “What comes next? and “How do we get there?
Nanolithography outlines the present state of the art in lithographic techniques, including optical projection in both deep and extreme ultraviolet, electron and ion beams, and imprinting. Special attention is paid to related issues, such as the resists used in lithography, the masks (or lack thereof), the metrology needed for nano-features, modeling, and the limitations caused by feature edge roughness. In addition emerging technologies are described, including the directed assembly of wafer features, nanostructures and devices, nano-photonics, and nano-fluidics.
This book is intended as a guide to the researcher new to this field, reading related journals or facing the complexities of a technical conference. Its goal is to give enough background information to enable such a researcher to understand, and appreciate, new developments in nanolithography, and to go on to make advances of his/her own.