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Postprocessing Techniques For Integrated Mems Sherif Sedky

  • SKU: BELL-1556616
Postprocessing Techniques For Integrated Mems Sherif Sedky
$ 31.00 $ 45.00 (-31%)

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Postprocessing Techniques For Integrated Mems Sherif Sedky instant download after payment.

Publisher: Artech House Publishers
File Extension: PDF
File size: 2.59 MB
Pages: 207
Author: Sherif Sedky
ISBN: 9781580539012, 1580539017
Language: English
Year: 2005

Product desciption

Postprocessing Techniques For Integrated Mems Sherif Sedky by Sherif Sedky 9781580539012, 1580539017 instant download after payment.

Sedky (physics, The American University, Cairo, Egypt) investigates the possibility of developing high-quality MEMS structural layers at temperatures compatible with the standard CMOS backend. He first reviews MEMS fabrication technologies, then defines the maximum thermal budget that can be accommodated by prefabricated standard electronics. He highlights the features of different materials suitable for MEMS, and discusses the effect of deposition conditions and the type of substrate on the physical properties of the different materials. Silicon germanium as a MEMS structural layer is also discussed in detail.

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