Resonant Mems Principles Modeling Implementation And Applications 1st Edition Oliver Brand by Oliver Brand, Isabelle Dufour, Stephen Heinrich, Fabien Josse, Jan G. Korvink, Osamu Tabata 9783527335459, 3527335455 instant download after payment.

Part of the AMN book series, this book covers the principles, modeling and implementation as well as applications of resonant MEMS from a unified viewpoint. It starts out with the fundamental equations and phenomena that govern the behavior of resonant MEMS and then gives a detailed overview of their implementation in capacitive, piezoelectric, thermal and organic devices, complemented by chapters addressing the packaging of the devices and their stability. The last part of the book is devoted to the cutting-edge applications of resonant MEMS such as inertial, chemical and biosensors, fluid properties sensors, timing devices and energy harvesting systems.