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Runtorun Control In Semiconductor Manufacturing James Moyne Enrique Del Castillo Arnon Max Hurwitz

  • SKU: BELL-4107178
Runtorun Control In Semiconductor Manufacturing James Moyne Enrique Del Castillo Arnon Max Hurwitz
$ 31.00 $ 45.00 (-31%)

5.0

100 reviews

Runtorun Control In Semiconductor Manufacturing James Moyne Enrique Del Castillo Arnon Max Hurwitz instant download after payment.

Publisher: CRC Press
File Extension: PDF
File size: 8.79 MB
Pages: 342
Author: James Moyne; Enrique Del Castillo; Arnon Max Hurwitz
ISBN: 9780849311789, 0849311780
Language: English
Year: 2001

Product desciption

Runtorun Control In Semiconductor Manufacturing James Moyne Enrique Del Castillo Arnon Max Hurwitz by James Moyne; Enrique Del Castillo; Arnon Max Hurwitz 9780849311789, 0849311780 instant download after payment.

Run-to-run (R2R) control is cutting-edge technology that allows modification of a product recipe between machine "runs," thereby minimizing process drift, shift, and variability-and with them, costs. Its effectiveness has been demonstrated in a variety of processes, such as vapor phase epitaxy, lithography, and chemical mechanical planarization. The only barrier to the semiconductor industry's widespread adoption of this highly effective process control is a lack of understanding of the technology. Run to Run Control in Semiconductor Manufacturing overcomes that barrier by offering in-depth analyses of R2R control

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