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Silicon Carbide Microelectromechanical Systems For Harsh Environments Illustrated Edition Rebecca Cheung

Name: Silicon Carbide Microelectromechanical Systems For Harsh Environments Illustrated Edition Rebecca Cheung
SKU: BELL-1188738
Price: 31.00 USD
Availability: InStock
Rating: 5 (80 reviews)

SKU: BELL-1188738

$ 31.00 ~~$ 45.00~~ (-31%)

5.0

80 reviews

Silicon Carbide Microelectromechanical Systems For Harsh Environments Illustrated Edition Rebecca Cheung instant download after payment.

Publisher: Imperial College Press; Distributed by World Scientific Pub

File Extension: PDF

File size: 8.68 MB

Pages: 193

Author: Rebecca Cheung

ISBN: 9781860946240, 1860946240

Language: English

Year: 2006

Edition: illustrated edition

Product desciption

Silicon Carbide Microelectromechanical Systems For Harsh Environments Illustrated Edition Rebecca Cheung by Rebecca Cheung 9781860946240, 1860946240 instant download after payment.

This unique book describes the science and technology of silicon carbide (SiC) microelectromechanical systems (MEMS), from the creation of SiC material to the formation of final system, through various expert contributions by several leading key figures in the field. The book contains high-quality up-to-date scientific information concerning SiC MEMS for harsh environments summarized concisely for students, academics, engineers and researchers in the field of SiC MEMS. This is the only book that addresses in a comprehensive manner the main advantages of SiC as a MEMS material for applications in high temperature and harsh environments, as well as approaches to the relevant technologies, with a view progressing towards the final product.