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Spectroscopic Ellipsometry Principles And Applications 1st Edition Hiroyuki Fujiwara

Name: Spectroscopic Ellipsometry Principles And Applications 1st Edition Hiroyuki Fujiwara
SKU: BELL-2031564
Price: 31.00 USD
Availability: InStock
Rating: 4 (86 reviews)

SKU: BELL-2031564

$ 31.00 ~~$ 45.00~~ (-31%)

4.0

86 reviews

Spectroscopic Ellipsometry Principles And Applications 1st Edition Hiroyuki Fujiwara instant download after payment.

Publisher: Wiley

File Extension: PDF

File size: 4.01 MB

Pages: 388

Author: Hiroyuki Fujiwara

ISBN: 9780470016084, 9780470060186, 0470016086, 0470060182

Language: English

Year: 2007

Edition: 1

Product desciption

Spectroscopic Ellipsometry Principles And Applications 1st Edition Hiroyuki Fujiwara by Hiroyuki Fujiwara 9780470016084, 9780470060186, 0470016086, 0470060182 instant download after payment.

Ellipsometry is a powerful tool used for the characterization of thin films and multi-layer semiconductor structures. This book deals with fundamental principles and applications of spectroscopic ellipsometry (SE). Beginning with an overview of SE technologies the text moves on to focus on the data analysis of results obtained from SE, Fundamental data analyses, principles and physical backgrounds and the various materials used in different fields from LSI industry to biotechnology are described. The final chapter describes the latest developments of real-time monitoring and process control which have attracted significant attention in various scientific and industrial fields.