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Wafer Fabrication Automatic Material Handling System Jie Zhang Huazhong University Of Science And Technology

  • SKU: BELL-51110996
Wafer Fabrication Automatic Material Handling System Jie Zhang Huazhong University Of Science And Technology
$ 31.00 $ 45.00 (-31%)

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Wafer Fabrication Automatic Material Handling System Jie Zhang Huazhong University Of Science And Technology instant download after payment.

Publisher: De Gruyter
File Extension: PDF
File size: 8.7 MB
Pages: 284
Author: Jie Zhang; Huazhong University of Science and Technology
ISBN: 9783110487473, 3110487470
Language: English
Year: 2018

Product desciption

Wafer Fabrication Automatic Material Handling System Jie Zhang Huazhong University Of Science And Technology by Jie Zhang; Huazhong University Of Science And Technology 9783110487473, 3110487470 instant download after payment.

This book systematically introduces modeling, performance evaluation and applications of Automatic Materiel Handling System (AMHS) in semiconductor manufactucing, and focuses discussion on the coordination of two subsystems. Resources dispatch and optimization are conducted on operational research combined with cases studies. Written in a practical way, it is an essential reference for researchers and engineers in manufacturing and management.



  • Presents mathematical foundations of intelligent manufacturing system.

  • Explores dispatch methods at local and system level.

  • Illustrates theories via case studies.

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